ANN modeling of a smart MEMS-based capacitive humidity sensor |
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Authors: | Kouda Souhil Dibi Zohir Barra Samir Dendouga Abdelghani and Meddour Fay?al |
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Affiliation: | (1) Department of Mechanical Engineering, R.O.C. Military Academy, Kaohsiung, 830, Taiwan;(2) Department of Mechanical and Automation Engineering, Da-Yeh University, Changhua, 515, Taiwan |
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Abstract: | This paper presents a design of a smart humidity sensor. First we begin by the modeling of a Capacitive MEMS-based humidity
sensor. Using neuronal networks and Matlab environment to accurately express the non-linearity, the hysteresis effect and
the cross sensitivity of the output humidity sensor used. We have done the training to create an analytical model CHS “Capacitive
Humidity Sensor”. Because our sensor is a capacitive type, the obtained model on PSPICE reflects the humidity variation by
a capacity variation, which is a passive magnitude; it requires a conversion to an active magnitude, why we realize a conversion
capacity/voltage using a switched capacitor circuit SCC. In a second step a linearization, by Matlab program, is applied to
CHS response whose goal is to create a database for an element of correction “CORRECTOR”. After that we use the bias matrix
and the weights matrix obtained by training to establish the CHS model and the CORRECTOR model on PSPICE simulator, where
the output of the first is identical to the output of the CHS and the last correct its nonlinear response, and eliminate its
hysteresis effect and cross sensitivity. The three blocks; CHS model, CORRECTOR model and the capacity/voltage converter,
represent the smart sensor. |
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