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氧化铝模板制备条件的探索
引用本文:默广,蔡泉,王维,陈兴,张坤浩,陈中军,吴忠华. 氧化铝模板制备条件的探索[J]. 核技术, 2007, 30(3): 171-173
作者姓名:默广  蔡泉  王维  陈兴  张坤浩  陈中军  吴忠华
作者单位:中国科学院高能物理研究所多学科中心,北京,100049;中国科学院研究生院,北京,100049;中国科学院高能物理研究所多学科中心,北京,100049
摘    要:在低温下通过改变第一次和第二次氧化条件尝试性地生长了系列模板,结合扫描电镜(SEM)研究了模板的孔间距和孔径与制备条件的关系.结果表明模板的形貌经两步氧化已达到最佳,孔间距受到第一步氧化的调制,改变第二步氧化的条件可以制备出不同孔径的模板.并在此基础上分析了模板的形成机理.

关 键 词:氧化铝模板  阳极氧化  制备方法  扫描电镜
修稿时间:2006-09-302006-12-11

Research on fabricating condition of alumina template
MO Guang,CAI Quan,WANG Wei,CHEN Xing,ZHANG Kunhao,CHEN Zhongjun,WU Zhonghua. Research on fabricating condition of alumina template[J]. Nuclear Techniques, 2007, 30(3): 171-173
Authors:MO Guang  CAI Quan  WANG Wei  CHEN Xing  ZHANG Kunhao  CHEN Zhongjun  WU Zhonghua
Affiliation:1. Institute of High Energy Physics, the Chinese Academy of Sciences, Beifing 100049, China ; 2.Graduate School of the Chinese Academy of Sciences, Beifing 100049, China
Abstract:A series of alumina template are fabricated through altering oxidation condition of the first-step and the second-step. Scanning electron microscopy is used to observeand characterize the inter-pore distance and the pore diameter. The results show that a two-step anodic oxidation is enough to get good micrograph. The inter-pore distance is determined by the first-step oxidation. Templates with different pore diameters can be prepared by altering the second-step oxidation condition. The growing mechanism of.alumina template is also discussed.
Keywords:Alumina template   Anodic oxidation   Preparing method   Scanning electron microscopy
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