| 电子波器件 |
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| 引用本文： | 张汉三.电子波器件[J].微电子学,1993,23(6):29-32. |
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| 作者姓名： | 张汉三 |
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| 作者单位： | 电子部第13研究所 河北石家庄050051 |
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| 摘 要： | 本文在简要介绍了电子波的概念之后,讨论了利用电子波原理实现高速半导体器件的可能性和条件。作为一个例子,介绍了电子波衍射晶体管的原理、结构、制造和性能。
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| 关 键 词： | 电子波器件 微结构 量子干涉效应 |
Election Wave Devices |
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| Zhang Hansan
Hebei Semiconductor Research Institute,Shijiazhoang,Hebei.Election Wave Devices[J].Microelectronics,1993,23(6):29-32. |
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| Authors: | Zhang Hansan
Hebei Semiconductor Research Institute Shijiazhoang Hebei |
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| Affiliation: | Zhang Hansan
Hebei Semiconductor Research Institute,050051,Shijiazhoang,Hebei |
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| Abstract: | A brief introduction to the concept of electron wave is made in the paper. The possibility of the application of the electron wave theory to high speed semiconductor devices and the requirements for it are also discussed. As an example,an electron wave diffraction transistor is presented,including its principle,structure,performance and its fabrication
techniques. |
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| Keywords: | Electron wave device Electron wave dif fraction Semiconductor microstructure Quantum interference effect |
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