| 8英寸线超纯水技术的若干特点 |
| |
| 引用本文： | 林耀泽. 8英寸线超纯水技术的若干特点[J]. 半导体技术, 2001, 26(9): 73-76 |
| |
| 作者姓名： | 林耀泽 |
| |
| 作者单位： | 原电子部无锡微电子科研中心, |
| |
| 摘 要： | 应小于等于0．25μm8英寸fab之需，介绍了实际工程的各项优越水质参数和高可靠、易运作等特点。讨论了水的回收技术、总有机碳（TOC）减低技术和安装，配管中的零污染的可能性。
|
| 关 键 词： | 超纯水 水质 集成电路 |
| 文章编号： | 1003-353(2001)09-0073-04 |
| 修稿时间： | 2001-05-25 |
Some aspects of ultrapure water for 8-inch fabs |
| |
| LIN Yao-ze. Some aspects of ultrapure water for 8-inch fabs[J]. Semiconductor Technology, 2001, 26(9): 73-76 |
| |
| Authors: | LIN Yao-ze |
| |
| Abstract: | Based on the requirements of 8-inch fabs at 0.25um or below, some parameters of top-level ultrapure water are described, and a ultrapure water system which is highly reliable and easily operated is illustrated. The technologies for the recovery of ultrapure water, reduction of TOC, and contamination-free installation and piping are presented. |
| |
| Keywords: | ultrapure water water quality recovery total organics carbon piping |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
