| 新型三维MEMS矢量水听器的设计 |
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| 引用本文： | 李振,张国军,薛晨阳. 新型三维MEMS矢量水听器的设计[J]. 传感技术学报, 2013, 26(7): 950-954 |
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| 作者姓名： | 李振 张国军 薛晨阳 |
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| 作者单位： | 中北大学仪器科学与动态测试教育部重点实验室;中北大学电子测试技术重点实验室 |
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| 基金项目： | 国家863计划项目(2011AA040404);国家自然科学基金项目(51205374);国家自然科学基金专项基金项目(61127008) |
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| 摘 要： | 根据国内对高灵敏度、低频小体积三维矢量水听器的需求,提出了一种仿鱼侧线纤毛的MEMS三维矢量水听器。该水听器采用多纤毛结构分别用来接收X、Y与Z方向的声信息,采用ANSYS进行仿真,静力分析得出了布放压阻的合理位置,谐响应分析得出该结构的固有频率在1.5 kHz左右;驻波桶校准测试结果表明:该水听器的灵敏度范围在-200 dB到-180 dB左右;在25 Hz～2 000 Hz频段内具有良好的频响特性;指向性分辨率大于等于30 dB,具有良好的"8"字形指向性。
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| 关 键 词： | 矢量水听器 MEMS ANSYS 仿生 |
Design of A New Three-Dimensional Vector Hydrophone |
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| LI Zhen,ZHANG Guojun,XUE Chenyang. Design of A New Three-Dimensional Vector Hydrophone[J]. Journal of Transduction Technology, 2013, 26(7): 950-954 |
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| Authors: | LI Zhen ZHANG Guojun XUE Chenyang |
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| Affiliation: | 1,2(1.Key Laboratory of Instrumentation Science and Dynamic Measurement,Ministry of Education,Taiyuan 030051,China; 2.Science and Technology on Electronic Test and Measurement Laboratory North University of China,Taiyuan 030051,China) |
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| Abstract: | According to the requirements of high sensitivity, low frequency and mall volume three-dimensional vector hydrophone, a new kind of three-dimensional MEMS vector hydrophone imitated fish''s lateral line sense organ is proposed in this paper. Multiple cilia structure of the hydrophone is used to received the acoustic information of X, Y and Z directions. The piezoresistive reasonable position is obtained through finite element analysis by ANSYS, and the resonance frequency is 1.5 KHz. A standing wave barre test results show that: the sensitivity range of the hydrophone can be from -200dB to about -180dB; and it has a good frequency response characteristics in 25Hz-2000Hz band; directivity tests display that the hydrophone has a good "8"-shaped directivity, and the directivity resolution is not less then 30dB. |
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