| 透明导电氧化锌薄膜的制备 |
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| 引用本文： | 贾芳,马晓翠,吕有明,曹培江,朱德亮.透明导电氧化锌薄膜的制备[J].材料导报,2008,3(1):13-15. |
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| 作者姓名： | 贾芳 马晓翠 吕有明 曹培江 朱德亮 |
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| 作者单位： | 深圳大学材料学院,深圳市特种功能材料重点实验室,深圳518060 |
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| 摘 要： | 简单回顾了透明导电氧化锌薄膜的发展历程，着重介绍了各种氧化锌薄膜的制备方法和各自的优缺点，以及改进方案和在实际生产中的应用，分析了透明导电氧化锌薄膜存在的问题和解决问题的思路，最后对于氧化锌这种极具替力的材料进行了展望。
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| 关 键 词： | 氧化锌 透明导电薄膜 制备方法 |
Preparation of Transparent Conductive ZnO Thin Film |
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| JIA Fang,MA Xiaocui,LU Youming,CAO Peijiang,ZHU Deliang.Preparation of Transparent Conductive ZnO Thin Film[J].Materials Review,2008,3(1):13-15. |
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| Authors: | JIA Fang MA Xiaocui LU Youming CAO Peijiang ZHU Deliang |
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| Affiliation: | ( Department of Material Science and Engineering, Shenzhen University, Shenzhen Key Laboratory of Special Functional Materials, Shenzhen University, Shenzhen 518060) |
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| Abstract: | The development process of transparent conductive ZnO thin film is reviewed simply in this paper. All kinds of ZnO thin film preparation methods and characteristics of them are detailed, and then the impoved projects and applications in practical production are particularly introduced. The problems existed in transparent conductive ZnO thin film and ideas of resolving problems are analysed. At last the expectation of ZnO potential material is advanced. |
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| Keywords: | ZnO conductive thin film preparation preparation method |
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