| 用于光通信的微电子机械系统技术进展 |
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| 引用本文： | 马军山 陈高庭. 用于光通信的微电子机械系统技术进展[J]. 激光与光电子学进展, 1999, 36(10): 11-18,33 |
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| 作者姓名： | 马军山 陈高庭 |
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| 作者单位： | 中国科学院上海光学精密机械研究所!上海201800 |
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| 摘 要： | 以光开关为主介绍了几种典型的用于光通信的微电子机械系统光器件的研究现状，并介绍了微电子机械系统技术进展。基于微电子机械系统技术，可以获得多种光通信器件。与传统器件相比，微电子机械系统光器件具有体积小、响应速度快、集成度高、成本低等优点，将在光通信领域发挥重要作用。
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| 关 键 词： | 微电子机械系统 光通信 光开关 |
Progress in Micro-electro-mechanical System Technology for Optical Communications |
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| Ma Junshan Chen Gaoting Wang Xiangzhao Fang Zujie. Progress in Micro-electro-mechanical System Technology for Optical Communications[J]. Laser & Optoelectronics Progress, 1999, 36(10): 11-18,33 |
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| Authors: | Ma Junshan Chen Gaoting Wang Xiangzhao Fang Zujie |
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| Abstract: | This paper introduces present research situation of micro electro mechanical system optical devices for optical communications and also introduces progress in MEMS technology Several optical communications devices can be realized by MEMS technology The MEMS optical devices has the advantages of small size, high speed, high integrability and low cost compared to conventional device, and will play an important part in optical communications |
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| Keywords: | Micro electro mechanical system optical communications optical switching |
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