面向表面微加工工艺的微器件设计框架的研究

本文以微器件设计为对象，对微硅表面制造驱动的微器件并行设计方法学及相应的计算机辅助设计工具的开发逻辑进行了研究，提出了采用基于三层Web-ASP集成框架实现e-CAD原型工具的编程方案，其中，并行任务流管理与控制，微器件实例及设计资源库，微加工工艺规划及仿真，微器件设计评价等是该系统实现的关键要素，在此基础上将建立网上微器件设计中心，并通过应用服务机制，实现对微器件设计工具使用的商务化，以达到降低设计成本，加快MEMS产业化之目的。

A Micro-component e-Design Framework for Surface Silicon Micro-manufacturing

In this paper, we take the micro - component design as research object, and study micro - component concurrent design methodology and the relevant development logic of CAD tools driven by the surface silicon micro - manufacturing. We put forward an integrated framework based on three - layer Web - ASP Internet computing model to carry out e - CAD prototype tools programming. Thereinto, the key factors of system realization include the management and control of concurrent design task flow, micro- component case and design resource library, micromachining process planning and simulation, micro- component design evaluation, etc. Based on these factors a web micro- component design center is constructed. Through application service mechanism it can realize the commercialization of micro - component design tools and reduce design cost, meanwhile accelerate the industrialization step of MEMS.