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Study of modification methods of probes for critical-dimension atomic-force microscopy by the deposition of carbon nanotubes |
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| Authors: | O. A. Ageev Al. V. Bykov A. S. Kolomiitsev B. G. Konoplev M. V. Rubashkina V. A. Smirnov O. G. Tsukanova |
| Affiliation: | 1. Institute for Nanotechnologies, Electronics, and Electronic Equipment Engineering, Southern Federal University, Taganrog, Rostov-on-Don region, Russia 2. NT-MDT, Moscow, Russia |
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