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Cellular automaton model of phase separation during annealing of nonstoichiometric silicon oxide layers |
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| Authors: | G. Ya. Krasnikov N. A. Zaitsev I. V. Matyushkin S. V. Korobov |
| Affiliation: | 1. JSC Research Institute of Molecular Electronics (NIIME), Zelenograd, Moscow, 124460, Russia |
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