| 基于氮氧化硅与聚合物混合集成低功耗全内反射热光开关 |
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| 引用本文： | 张燕,陈开鑫,郑军凯.基于氮氧化硅与聚合物混合集成低功耗全内反射热光开关[J].中国激光,2011(11). |
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| 作者姓名： | 张燕 陈开鑫 郑军凯 |
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| 作者单位： | 电子科技大学通信与信息工程学院;电子科技大学机械电子工程学院; |
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| 基金项目： | 国家自然科学基金(61177054)资助课题 |
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| 摘 要： | 利用具有相反热光特性的氮氧化硅(SiON)与聚合物材料,采用混合集成技术设计了一种低功耗全内反射(TIR)热光波导开关。该光开关通过在两交叉的氮氧化硅波导芯的X结中心部分制作一个深度等于波导芯厚度的狭缝,并在其中填充与波导包层相同的聚合物材料,同时在狭缝聚合物上方制作加热电极来实现开关功能。理论分析表明,通过选择与氮氧化硅折射率相匹配的聚合物材料,并优化设计单模光波导尺寸,两交叉波导间的夹角、所开狭缝的宽度以及相应的加热电极结构,对于1550nm的工作波长,开关的驱动功率在低至2.3mW时仍可实现消光比均大于36dB,串扰均小于-36dB的TE与TM模式。
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| 关 键 词： | 光电子学 光开关 热光原理 氮氧化硅 全内反射 混合集成 聚合物 |
Hybrid Integrated SiON/Polymer Low Power Thermo-Optic Switch with Total Internal Reflection Effect |
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| Zhang Yan Chen Kaixin Zheng Junkai School of Communication , Information Engineering,University of Electronics Science , Technology of China,Chengdu,Sichuan ,China School of Mechatronics Engineering,China.Hybrid Integrated SiON/Polymer Low Power Thermo-Optic Switch with Total Internal Reflection Effect[J].Chinese Journal of Lasers,2011(11). |
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| Authors: | Zhang Yan Chen Kaixin Zheng Junkai School of Communication Information Engineering University of Electronics Science Technology of China Chengdu Sichuan China School of Mechatronics Engineering China |
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| Affiliation: | Zhang Yan1 Chen Kaixin1 Zheng Junkai2 1School of Communication and Information Engineering,University of Electronics Science and Technology of China,Chengdu,Sichuan 611731,China 2School of Mechatronics Engineering,China |
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| Abstract: | By utilizing the opposite thermo-optical characteristics of silicon oxynitride(SiON) and polymer materials,a hybrid integrated SiON/polymer waveguide total internal reflection(TIR) thermo-optic(TO) switch has been designed.The operation of the suggested switch is using an electrode heater,which is fabricated on a trench that is located in the center part of SiON waveguide X-junction and filled with the same polymer material as the cladding used,to adjust the refractive index of the polymer filled in the tre... |
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| Keywords: | optoelectronics optical switch thermo-optic effect silicon oxynitride total-internal-reflection hybrid integrated polymer |
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