| 传感器薄膜结构的改进与响应时间的分析 |
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| 引用本文： | 杨英,陈向东,蔡镔.传感器薄膜结构的改进与响应时间的分析[J].传感器与微系统,2009,28(5):52-54. |
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| 作者姓名： | 杨英 陈向东 蔡镔 |
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| 作者单位： | 西南交通大学,信息科学与技术学院,四川,成都,610031 |
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| 基金项目： | 国家自然科学基金，教育部新世纪优秀人才支持计划 |
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| 摘 要： | 提出了一种具有立体敏感效应的新型气体传感器敏感薄膜结构模型，即将传统的厚度均匀的平面型传感器敏感薄膜改进为由多条半圆柱凸起与多条沟槽相间隔的立体敏感结构。并根据扩散反应理论对新型和传统型2种薄膜结构的传感器响应时间进行了分析与比较，证明新型敏感结构的传感器具有更短的响应时间；分析了半囱柱凸起间距的相对系数对传感器响应时间的影响，得出了最佳取值。
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| 关 键 词： | 立体敏感效应 半圆柱体 响应时间 气体传感器 |
Development of sensor's film structure and analysis of response time |
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| YANG Ying,CHEN Xiang-dong,CAI Bin.Development of sensor's film structure and analysis of response time[J].Transducer and Microsystem Technology,2009,28(5):52-54. |
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| Authors: | YANG Ying CHEN Xiang-dong CAI Bin |
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| Affiliation: | YANG Ying,CHEN Xiang-dong,CAI Bin(School of Information Science& Technology,Southwest Jiaotong University,Chengdu 610031,China) |
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| Abstract: | A new film structure model of gas sensor with three-dimensional sensitive effect is provided,which is improving the traditional planar structure of uniform thickness to the new sensitive three-dimensional structure with more half-cylinder uplifts and more grooves.According to the proliferation response theory,the film sensor response times of both new and traditional structure sensor are analyzed and compared.This proves that the response time of the sensor with the new sensitive structure is short.And the ... |
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| Keywords: | three-dimensional sensitive effect half-cylinder response time gas sensor |
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