| CDMS－1型电视线宽测量仪设计与检测 |
| |
| 引用本文： | 沈蓓军,丁生华.CDMS－1型电视线宽测量仪设计与检测[J].光学精密工程,1994,2(1):89-94. |
| |
| 作者姓名： | 沈蓓军 丁生华 |
| |
| 作者单位： | 中国科学院上海光学精密机械研究所, 上海 201800 |
| |
| 摘 要： | 本文介绍了中科院上海光机所研制的CDMS-1型电视线宽测量系统设计及检测。线宽测量技术主要用于集成电路生产的在线测量,以及掩模制造中的质量控制,CDMS-1型电视线宽测量仪利用计算机对集成电路图像进行数字处理,从而保证了仪器测量精度。经检测表明该系统的各项测试指标均达到原设计要求。
|
| 关 键 词： | 线宽测量 光学计量仪器 |
| 收稿时间： | 1993-01-22 |
Design and Test for Model CDMS-1 Video Scanning Linewidth Measurement System |
| |
| Shen Beijun,Ding Shenghua,Zou Haixing,Lu Dunwu,Yang Liangmin.Design and Test for Model CDMS-1 Video Scanning Linewidth Measurement System[J].Optics and Precision Engineering,1994,2(1):89-94. |
| |
| Authors: | Shen Beijun Ding Shenghua Zou Haixing Lu Dunwu Yang Liangmin |
| |
| Affiliation: | Shanghai Institute of Optics and Fine Mechanics academia Sinica, Shanghai 201800 |
| |
| Abstract: | The paper introduces the design and test for Model CDMS-1 Video Scanning LinewidthMeasurement System developped by Shanghai Institute of Optics and Fine Mechanics.Thelinewidth measurement technolog is mainly used in IC manufacture and mask quality control.This instrument gains high acctiracy by using computer digital image processing technology.The test result of this measurement system shows that all expected system specifications are achieved. |
| |
| Keywords: | Linewidth Measurement Optical Metrology Instruments |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《光学精密工程》浏览原始摘要信息 |
|
点击此处可从《光学精密工程》下载全文 |
