| M-Z型硅基ARROW压力传感器设计 |
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| 引用本文： | 肖素艳,王东红,刘晓为,秦建勇. M-Z型硅基ARROW压力传感器设计[J]. 微纳电子技术, 2003, 0(Z1) |
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| 作者姓名： | 肖素艳 王东红 刘晓为 秦建勇 |
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| 作者单位： | 哈尔滨工业大学MEMS中心 黑龙江哈尔滨150001(肖素艳，王东红，刘晓为)，哈尔滨工业大学MEMS中心 黑龙江哈尔滨150001(秦建勇) |
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| 摘 要： | 分析了M Z型硅基ARROW压力传感器的结构设计参数 ,并用计算机软件ANSYS对如下参数进行有限元方法 (FEM )研究 ,模拟了硅弹性膜片应力分布 ,确定了弹性膜边缘是传感臂具有高灵敏度的理想位置 ,并据此计算出由光弹性效应引起传感臂相位变化及其与压力的之间线性关系
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| 关 键 词： | 抗共振反射光波导 压力传感器 有限元方法,膜片 传感臂 光弹性效应 |
Design of Mach-Zehnder interferometer for Si-based ARROW pressure sensor |
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| XIAO Su yan,WANG Dong hong,LIU Xiao wei,QIN Jian yong. Design of Mach-Zehnder interferometer for Si-based ARROW pressure sensor[J]. Micronanoelectronic Technology, 2003, 0(Z1) |
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| Authors: | XIAO Su yan WANG Dong hong LIU Xiao wei QIN Jian yong |
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| Abstract: | The structure parameters of M Z Si based ARROW pressure sensors for optimized design are presented and studied by the finite element method with the computer software ANSYS:the edge of the diaphragm located on the sensing arm is the desirable position for high sensitivity. Based on this, the phase change induced in the sensing arm caused by photoelastic effect is calculated, and the linear relationship between the phase change in the sensing arm and the applied pressure is finally obtained. |
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| Keywords: | anti resonant reflecting optical waveguide (ARROW) pressure sensors finite element method (FEM) diaphragm sensing arm photoelastic effect |
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