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一种基于AFM的金刚石刀具刃口锋利度的检测方法
引用本文:张晓峰,王宝瑞,杜文浩,刘兴宝.一种基于AFM的金刚石刀具刃口锋利度的检测方法[J].工具技术,2011,45(2):120-125.
作者姓名:张晓峰  王宝瑞  杜文浩  刘兴宝
作者单位:中国工程物理研究院
摘    要:金刚石刀具刃口纳米级别的锋利度是影响超精密加工表面质量特别是表面微观几何形貌的重要因素.针对目前测量中存在的问题,介绍了一种新的使用原子力显微镜(Atomic Force Microscope,AFM)进行金刚石刀具刃口锋利度检测的方法,该方法首先利用仿射变换进行截面数据提取,然后利用一种基于曲率的算法求出圆弧拟合点,...

关 键 词:金刚石刀具  锋利度  原子力显微镜

A Measuring Method for Blade Sharpness of Diamond Tools Based on AFM
Zhang Xiaofeng,Wang Baorui,Du Wenhao,Liu Xinghao.A Measuring Method for Blade Sharpness of Diamond Tools Based on AFM[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2011,45(2):120-125.
Authors:Zhang Xiaofeng  Wang Baorui  Du Wenhao  Liu Xinghao
Affiliation:Zhang Xiaofeng,Wang Baorui,Du Wenhao,Liu Xingbao,Postgraduate,Institue of Mechanical Manufacturing Technology,China Academy of Engineering Physics,Mianyang,Sichuan 621900,China
Abstract:The nanometer level sharpness of diamond tools has been found to be an important factor affecting surface quality especially surface morphology of micro geometric on arultra-precision machining.This paper introduces a new method based on Atomic Force Microscope(AFM) to mesure the sharpness of diamond tools.First we use the method of affine transform to extract data,then using the algorithm based on a circular arc curvature to fit point,at last doing some work on constrained arc fitting,and giving a single s...
Keywords:diamond tools  blade sharpness  atomic force microscope  
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