| The Diagnosis of Plasma Parameters in Surface Alloying Technique by Optical Emission Spectrometry |
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| 引用本文： | 付亚波 张跃飞 陈强 张广秋 高原 王建忠 隗晓云. The Diagnosis of Plasma Parameters in Surface Alloying Technique by Optical Emission Spectrometry[J]. 等离子体科学和技术, 2006, 8(4): 461-463 |
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| 作者姓名： | 付亚波 张跃飞 陈强 张广秋 高原 王建忠 隗晓云 |
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| 作者单位： | [1]Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication,Beijing 102600, China [2]Institute of Surface Engineering, Taiyuan University of Technology, Taiyuan 030024, China |
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| 基金项目： | supported by National Steel Union Foundation of China （No. 50374050） |
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| 摘 要： | Electron density （Ne） in a glow discharge plasma for the surface alloying technique is diagnosed by optical emission spectrometry （OES）. With CH4 as the feeding gas, Ne is obtained by comparing the Hβ spectrum according to the Stark broadening effect. It is noticed that Ne varies with the working pressures （30 Pa to 70 Pa） and cathode voltages （500 V to 1000 V）, respectively. Due to an abnormal glow discharge, Ne is between 1. 71 × 10^15 /cm^3 to 6.64 × 10^15 /cm^3 and increases rapidly with working gas pressures and cathode voltages. The results show that OES is a useful method to measure the plasma parameters in a surface alloying glow discharge plasma.
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| 关 键 词： | 辉光放电 等离子体 发射光谱测定 表面铸合技术 电子密度 |
| 收稿时间： | 2005-08-25 |
| 修稿时间： | 2005-08-25 |
The Diagnosis of Plasma Parameters in Surface Alloying Technique by Optical Emission Spectrometry |
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| FU Yabo, ZHANG Yuefei, CHEN Qiang, ZHANG Guangqiu, GAO Yuan, WANG Jianzhong, KUI Xiaoyun. The Diagnosis of Plasma Parameters in Surface Alloying Technique by Optical Emission Spectrometry[J]. Plasma Science & Technology, 2006, 8(4): 461-463 |
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| Authors: | FU Yabo ZHANG Yuefei CHEN Qiang ZHANG Guangqiu GAO Yuan WANG Jianzhong KUI Xiaoyun |
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| Abstract: | |
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| Keywords: | surface alloying technique optical emission spectrometry electron density |
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