| 一种提高悬臂粱振动参数测量技术的研究 |
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| 引用本文： | 唐朝伟,何国田,曾毅,傅明怡,赵丽娟,李小龙,胡军. 一种提高悬臂粱振动参数测量技术的研究[J]. 激光杂志, 2008, 29(2): 66-67 |
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| 作者姓名： | 唐朝伟 何国田 曾毅 傅明怡 赵丽娟 李小龙 胡军 |
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| 作者单位： | 重庆大学 重庆400030(唐朝伟，傅明怡，赵丽娟，李小龙，胡军)，重庆师范大学 重庆400030(何国田，曾毅) |
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| 摘 要： | 正弦相位调制干涉测量技术是一种高精度光学测量技术,可用于MEMS振动、振动分布、位移等物理量的测量。本文提出一种提高悬臂粱振动参数测量精度的方法,并分析了测量原理。该方法通过反馈控制回路消除了外界干扰和光强调制对测量精度的影响,并以纳米精度对悬臂粱的振动进行了检测,可得到悬臂粱在光激励下发生振动的相关振动特性参数。
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| 关 键 词： | 干涉测量 振动 MEMS 悬臂梁 正弦相位调制 |
| 文章编号： | 0253-2743(2008)02-0066-02 |
| 修稿时间： | 2007-12-22 |
Study on vibration characteristic of cantilever in MEMS |
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| TANG Chao-wei,HE Guo-tian,ZENG Yi,FU Ming-yi,ZHAO Li-juan,Xiao-long,HU Jun. Study on vibration characteristic of cantilever in MEMS[J]. Laser Journal, 2008, 29(2): 66-67 |
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| Authors: | TANG Chao-wei HE Guo-tian ZENG Yi FU Ming-yi ZHAO Li-juan Xiao-long HU Jun |
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| Abstract: | The sinusoidal phase-modulating(SPM) interferometry is an extremely accurate optical measurement technique,which has many characteristics,such as high sensitivity,high precision,simple structure and so on.It can be used in the physical quantity measurement of vibration,displacement,surface profile.Hence,Sinusoidal phase-modulating interferometry is proposed in this paper to be applied in MEMS cantilever vibration measurement.The relational characteristics of cantilever vibration with this kind of chips under optical excitation can be gotten,and the measurement principle is analyzed.This method eliminates the influence on the measuring precision which caused by external interference and light intensity change through feedback control loop.The experiment results proved that this measurement method has a good effect. |
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| Keywords: | Interferometry vibration MEMS Cantilever SPM |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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