Quantitative atomic 3-D imaging of single/double sheet graphene structure

Graphene sheets can be regarded as base structure of many carbon nanostructures, and atomic arrangements and variations in the atomic structure have a drastic impact on their unique properties. Using a single/double layer graphene model structure, we present a strategy to “see” single carbon atoms in 3-D. In high-resolution transmission electron microscopy, exit-wave images are essential to obtain and to understand 3-D atomic structure. Using electrons at 80 kV not only minimizes the knock-on damage, but also improves the detection sensitivity due to the higher scattering power of carbon at lower acceleration voltage of the electron. Using experiments and image simulations, positions of individual carbon atoms in a single/double layer structure in graphene have been identified.