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Design and fabrication of a six-dimensional wrist force/torque sensor based on E-type membranes compared to cross beams
Authors:Qiaokang Liang  Dan Zhang  Quanjun Song  Yunjian Ge  Huibin Cao  Yu Ge
Affiliation:1. State Key Laboratories of Robot Sensing Systems, Institute of Intelligent Machines, Chinese Academy of Sciences, China;2. Department of Automation, University of Science and Technology of China, Hefei, Anhui, China;3. Faculty of Engineering and Applied Science, University of Ontario Institute of Technology, Oshawa, Ontario, Canada L1H 7K4
Abstract:This paper presents a novel device for measuring components of forces and moments along and about three orthogonal axes based on E-type membranes compared to conventional sensor based on cross beams. After design and analysis of both types of sensors, we chose to fabricate a six-dimensional wrist force/torque sensor based on E-type membranes. Furthermore, the calibration and decoupling based on Neural Network method were performed, and the sensor possesses excellent characteristics such as high measurement sensitivity, overload protection, good linearity, and weak couplings between components. Finally, its maximum interference error and nonlinearity error are 1.6% F.S. and 0.17% F.S., respectively.
Keywords:Force/torque sensor   Force-sensing element   Six-dimensional   E-type membrane
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