| HfO2膜料中的杂质对薄膜损伤及性能的影响 |
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| 引用本文： | 吴师岗,邵建达,易葵,赵元安,范正修.HfO2膜料中的杂质对薄膜损伤及性能的影响[J].稀有金属材料与工程,2006,35(5):757-760. |
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| 作者姓名： | 吴师岗 邵建达 易葵 赵元安 范正修 |
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| 作者单位： | 中国科学院上海光学精密机械研究所,上海,201800 |
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| 基金项目： | 致谢：感谢北京有色金属研究总院王星明高级工程师为作者提供了参观Hf02膜料制备工艺的机会,并感谢对Hf02膜料制备过程中可能引入杂质的有益探讨. |
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| 摘 要： | 通过对HfO2膜料中杂质元素的分析，找出了影响薄膜性能的主要杂质元素。结果表明：金属元素、吸收性介质元素的存在对薄膜的损毁有很大负面影响；在紫外波段，Zr元素含量大的薄膜吸收较大；并且提出负离子元素在膜料蒸发过程中形成气源中心，产生喷溅，从而使薄膜的损伤阈值降低。
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| 关 键 词： | HfO2膜料 杂质 金属 吸收性介质 Zr元素 负离子元素 |
| 文章编号： | 1002-185X(2006)05-0757-04 |
| 收稿时间： | 2005-04-22 |
| 修稿时间： | 2005年4月22日 |
Effects of Impurities on the Damage and Property for HfO2 Coating Material |
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| Wu Shigang,Shao Jiand,Yi Kui,Zhao Yuanan,Fan Zhengxiu.Effects of Impurities on the Damage and Property for HfO2 Coating Material[J].Rare Metal Materials and Engineering,2006,35(5):757-760. |
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| Authors: | Wu Shigang Shao Jiand Yi Kui Zhao Yuanan Fan Zhengxiu |
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| Affiliation: | Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China |
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| Abstract: | By analysis of impurity elements in HfO2 coating material, the influence of main impurity elements on the characteristic of coatings were studied. The results indicate that the metal elements and absorptive dielectric elements damage the HfO2 coatings. The more the Zr element content is, source center and form an the more the absorption is for the coatings in ultraviolet wave. The negative ion element will become the gas ejection in the process of evaporation of coating material, so decrease the damage threshold of the coatings. |
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| Keywords: | HfO2 coating material impurities metal element absorption dielectric Zr element negative ion element |
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