SPM图像模拟、表面重建及探针估计

扫描探针显微镜获得的图像是样品和探针共同作用的结果，它只是被测样品实际形貌的近似描述，所以进行定量的SPM图像模拟，探针估计和表面重建工作十分必要，本文分析比较了几种SPM图像处理的算法，且应用数学形态学方法给出了一些典型表面的图像模拟，表面重建以及探针估计的结果，这在样品表面形貌的精确探测以及纳米计量中均有重要意义。

SPM image simulation, surface reconstruction and tip estimation

The image produced by SPM is a combination of tip geometry and sample surface, it is only an approximation of the actual specimen surface. So it's necessary to simulate image, reconstruct surface and estimate tip geometry quantitatively. In this article some reconstruction algorithms were compared,results of image simulation, surface reconstruction and tip estimation using mathematical morphology algorithms were also presented. All these have important meaning in nanometer metrology.