硅微阵列陀螺仪的仿真、设计与测试

为了提高硅微机械陀螺仪的精度和工作可靠性,提出了一种新的硅微阵列陀螺仪结构设计方案。该陀螺仪由4个质量块构成,采用半解耦结构设计,结构完全对称,驱动模态和检测模态的频率匹配性好。分析了硅微阵列陀螺仪的结构和工作原理,并利用ANSYS有限元软件进行了结构仿真,通过调节结构参数实现了各驱动模态与敏感模态固有频率的匹配。对阵列陀螺仪样品进行了测试,实验测试结果表明,驱动模态存在3个振型,同频反相振动的幅值最大,与仿真结果一致。

Simulation,Design and Test of Silicon Micro-Gyroscope Array

In order to improve the accuracy and reliability of the silicon micro-gyroscope,a new Micro-gyroscope Array is proposed.The fully symmetrical and half-decoupled quad-mass structure enables the matched resonant frequencies for the drive and sense modes.The structure and the principle of operation were analyzed.The structural simulation of the gyroscope was developed by utilizing the finite element software ANSYS.The resonant frequencies for the drive mode and sense mode were matched by adjusting the structure parameter.The driving and sensing frequencies of the gyroscope were tested.The test results show that the drive mode has three vibration types and the amplitude of the Reversed phase mode is the largest one which is in agreement with the simulation analysis.