| 超纯水精处理系统与水质评价 |
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| 引用本文： | 林耀泽.超纯水精处理系统与水质评价[J].微纳电子技术,2001,38(3):48-51. |
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| 作者姓名： | 林耀泽 |
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| 作者单位： | 电子五十八所,江苏,无锡,214035 |
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| 摘 要： | 以应 0 .5 μm技术之需而设的一套超纯水精处理系统为实例 ,介绍了其工艺流程及特点 ,给出各项水质参数的实测数据 ,进而评述≤ 0 .2 5 μm/ 8英寸线的水质评价项目及其限定值、分析手段和应具有的在线检测仪表。
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| 关 键 词： | 超纯水 精处理 水质 仪表 |
| 文章编号： | 1001-5507(2001)03-0048-04 |
| 修稿时间： | 2001年2月20日 |
A polishing system for ultrapure water and evaluation of ultrapure water quality |
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| LIN Yao-ze.A polishing system for ultrapure water and evaluation of ultrapure water quality[J].Micronanoelectronic Technology,2001,38(3):48-51. |
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| Authors: | LIN Yao-ze |
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| Abstract: | Taking the ultrapure water polishing system designed for 0 5μm technology as an example,the process flow and characteristics for ultrapure water polishging are described.The measurements of the water quality are reviewed,and the parameters,limited values,analysis methods and necessary on-line measurement instruments for evaluation of the water quality for a ≤0 25μm 8-inch production line are presented. |
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| Keywords: | ultrapure water polishing water quality instrument |
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