单层二氧化钛薄膜的偏振散射特性 |
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引用本文: | 潘永强,田爱玲,杭凌侠.单层二氧化钛薄膜的偏振散射特性[J].红外与激光工程,2015,44(10):3015-3019. |
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作者姓名: | 潘永强 田爱玲 杭凌侠 |
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作者单位: | 1.西安工业大学光电工程学院,陕西 西安 710032 |
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基金项目: | 陕西省自然科学基础研究计划(2014JM8333);陕西省教育厅专项科研计划(2013JK1108);兵器预研支撑基金(9140A18020114BQ03251) |
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摘 要: | 为了用散射法研究单层薄膜表面粗糙度的变化规律,以光学薄膜矢量光散射理论为基础,分析了单层二氧化钛薄膜分别在完全相关和完全非相关模型下的偏振双向反射分布函数,以及P偏振入射光引起的P偏振的BRDFpp随散射方位角的变化关系。理论研究结果表明:随着散射方位角的变化,P偏振入射光引起的P偏振的BRDFpp强烈依赖于膜层界面粗糙度的相关特性。在完全相关模型下,随着入射角的增加,BRDFpp随着散射方位角变化时所出现的谷值会随着入射角的增加而减小。
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关 键 词: | 薄膜 矢量光散射 偏振散射 偏振双向反射分布函数 |
收稿时间: | 2015-02-24 |
Polarized light scattering of single titanium dioxide thin film |
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Affiliation: | 1.School of Photoelectric Engineering,Xi'an Technological University,Xi'an 710032,China |
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Abstract: | In order to study the changing rule of single layer thin film surface roughness using light scattering, the polarized bidirectional reflectance distribution function(P-BRDF) of the single titanium dioxide thin film at fully correlated and uncorrelated model were researched respectively based on the vector scattering theory of optical thin film. The relationship of scattering azimuth angle and BRDFpp, P-polarized scattered light caused by P-polarized incident light, was researched. The theoretical results show that BRDFpp strongly depends on the correlation between interfaces roughness of thin film and substrate with azimuth angle changing. The scattering azimuth angle of BRDFpp valley value can decrease with the increase of incident angle at fully correlated model. The result is reverse to uncorrelated model. BRDFpp does not appear valley value as the change of scattering azimuth angle. |
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