| LaB6薄膜的制备工艺研究 |
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| 引用本文： | 朱炳金,陈泽祥,张强. LaB6薄膜的制备工艺研究[J]. 真空, 2008, 45(1): 37-40 |
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| 作者姓名： | 朱炳金 陈泽祥 张强 |
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| 作者单位： | 电子科技大学光电信息学院,成都市建设北路二段四号,610054 |
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| 摘 要： | 分别用电子束蒸发和电泳的方法在不同的衬底上制备出了LaB6薄膜，用扫描电镜（SEM）对样品表面形貌进行了分析，同时利用x射线衍射（XRD）分析了成膜参数衬底温度以及退火处理对LaB6薄膜结晶性能的影响。结果表明，所得样品为LaB6多晶薄膜，合适的衬底温度和退火处理能够提高LaB6薄膜的结晶质量。并对两种成膜方式进行了比较。
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| 关 键 词： | 电子束蒸发 电泳 LaB6薄膜 多晶 XRD 膜的制备 工艺研究 thin films 比较 成膜方式 结晶质量 多晶薄膜 结果 影响 结晶性能 退火处理 衬底温度 成膜参数 射线衍射 利用 分析 表面形貌 样品 扫描电镜 方法 |
| 文章编号： | 1002-0322（2008）01-0037-04 |
| 收稿时间： | 2007-07-08 |
| 修稿时间： | 2007-07-08 |
On the preparation of LaB6 thin films |
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| ZHU Bing-jin,CHEN Ze-xiang,ZHANG Qiang. On the preparation of LaB6 thin films[J]. Vacuum(China), 2008, 45(1): 37-40 |
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| Authors: | ZHU Bing-jin CHEN Ze-xiang ZHANG Qiang |
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| Abstract: | LaB6 thin films were prepared on the different substrates by electron beam evaporation and electrophoretic coating processes, The surface morphologies of the films were characterized by SEM, with XRD used to investigate the influence of such coating parameters as substrate temperature and annealing on the crystallization of the LaB6 films. The results showed that in both ways the thin films obtained are polycrystalline LaB6 films with cubic structure, and their crystallization quality can be improved by appropriate substrate temperature and annealing. The results of the two preparation processes are compared with each other. |
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| Keywords: | electron beam evaporation electrophoretic coating LaB6 thin film polycrystalline XRD |
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