Data Extraction from Terahertz Time Domain Spectroscopy Measurements

The potential of terahertz (THz) time domain spectroscopy to simultaneously determine the complex dielectric parameters of materials and their geometrical thickness is of high interest for scientific spectroscopy and for general metrology. This paper provides an overview of the background of the data extraction from THz measurements and discusses the accuracy and ambiguity of this extraction process. It is shown that the signal to noise ratio of the measurement as well as the bandwidth of the accessible THz spectrum define the limitation of the achievable accuracy in the data extraction.