非零位拼接检测凸非球面金属反射镜

随着单点金刚石车削技术和抛光技术的发展，实现了金属反射镜的快速高效低成本制造。然而，金属反射镜的检测手段存在明显不足，尤其是没有一种快速、高效的检测手段用于检测凸非球面金属反射镜。为提高凸非球面金属反射镜的检测效率，提出一种非零位拼接检测凸非球面金属反射镜的检测方法。结合工程实例，对口径为120 mm，顶点曲率半径R为1121.586 mm，二次曲线常数K为?2.38的凸非球面金属反射镜进行了拼接检测实验，拼接所得面形误差均方根值（RMS）为0.016λ(λ=632.8 nm)。与Luphoscan检测结果对比，验证了非零位拼接检测方法的检测精度RMS为0.007λ，结果表明该方法能够实现凸非球面金属反射镜的快速、高效检测。

Non-null stitching test convex aspheric metal mirror

With the development of single-point diamond turning technology (SPDT) and polishing technology, the rapid, efficient and low-cost manufacturing of metal mirrors has been realized. However, the test methods of metal mirrors have obvious shortcomings, especially there is no fast and efficient test method for testing convex aspheric metal mirrors. In order to improve the test efficiency of convex aspheric metal mirrors, a non-null stitching method to test convex aspheric metal mirrors was proposed. Combined with engineering examples, a stitching test experiment was carried out on a convex aspheric metal mirror with a diameter of 120 mm, a radius of curvature of the vertex R of 1121.586 mm, and a conic constant K of ?2.38. The residual surface shape obtained by stitching RMS=0.016λ(λ=632.8 nm). Compared with the Luphoscan test results, it is verified that the test accuracy of the non-null stitching test method RMS=0.007λ, which shows this test method can achieve rapid and efficient test of convex aspheric metal mirrors.