| 新型双向电容式MEMS加速度计特性分析 |
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| 引用本文： | 董林玺,李永杰,颜海霞,孙玲玲. 新型双向电容式MEMS加速度计特性分析[J]. 半导体学报, 2010, 31(5): 054006-6 |
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| 作者姓名： | 董林玺 李永杰 颜海霞 孙玲玲 |
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| 作者单位： | Laboratory;Circuits;System;Ministry;Education;Hangzhou;Dianzi;University;State;Transducer;Technology;Chinese;Academy;Sciences（shanghai）;Toshiba;Hydro-Electro;Equipments;Company; |
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| 摘 要： | 文章研究了一新型的栅形条电容MEMS加速度计，通过新型结构设计降低了传感器的机械噪声和电子噪声。用软件ANSOFT-Maxwell对栅形条电容的宽度、厚度及叠加宽度对检测电容的影响进行了分析。用深度离子刻蚀工艺和硅-玻璃键合工艺制作了传感器，初步测试结果表明其在X和Y方向的灵敏度分别为0.53pF/g 、0.49pF/g。制作的栅形条谐振子在大气下的品质因子达到514，说明栅形条结构可大大降低机械噪声。
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| 关 键 词： | 微机械加速度计 电容式 MEMS 深反应离子刻蚀 双轴 电网结构 ANSOFT 边缘地带 |
| 修稿时间： | 2010-01-07 |
Characteristics of a novel biaxial capacitive MEMS accelerometer |
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| Dong Linxi,Li Yongjie,Yan Haixia and Sun Lingling. Characteristics of a novel biaxial capacitive MEMS accelerometer[J]. Chinese Journal of Semiconductors, 2010, 31(5): 054006-6 |
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| Authors: | Dong Linxi Li Yongjie Yan Haixia Sun Lingling |
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| Affiliation: | Key Laboratory of RF Circuits and System of Ministry of Education, Hangzhou Dianzi University, Hangzhou 310018, China; State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050, China;Key Laboratory of RF Circuits and System of Ministry of Education, Hangzhou Dianzi University, Hangzhou 310018, China;Toshiba Hydro-Electro Equipments Company, Hangzhou 311504, China;Key Laboratory of RF Circuits and System of Ministry of Education, Hangzhou Dianzi University, Hangzhou 310018, China |
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| Abstract: | A novel MEMS accelerometer with grid strip capacitors is developed.The mechanical and electrical noise can be reduced greatly for the novel structure design.ANSOFT-Maxwell software was used to analyze the fringing electric field of the grid strip structure and its effects on the designed accelerometer.The effects of the width,thickness and overlapping width of the grid strip on the sensing capacitance are analyzed by using the ANSOFT-Maxwell software.The results show that the parameters have little effect o... |
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| Keywords: | MEMS biaxial accelerometer capacitor fringe effect slide-film damping |
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