Catalyst‐Free GaN Nanorods Synthesized by Selective Area Growth |
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| Authors: | Yen‐Ting Lin Ting‐Wei Yeh Yoshitake Nakajima P Daniel Dapkus |
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| Affiliation: | 1. Center for Energy Nanoscience, University of Southern California, Los Angeles, CA, USA;2. Ming Hsieh Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA;3. Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA, USA |
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| Abstract: | GaN nanorod formation on Ga‐polar GaN by continuous mode metalorganic chemical vapor deposition selective area growth (MOCVD SAG) is achieved under a relatively Ga‐rich condition. The Ga‐rich condition, provided by applying a very low V/III ratio, alters the growth rates of various planes of the defined nanostructure by increasing relative growth rate of the semi‐polar tilted m‐plane {1–101} that usually is the slowest growing plane under continuous growth conditions. This increased growth rate relative to the non‐polar m‐plane {1–100} and even the c‐plane (0001), permits the formation of GaN nanorods with nonpolar sidewalls. In addition, a new growth mode, called the NH3‐pulsed mode, is introduced, utilizing the advantages of both the continuous mode and the lower growth rate pulsed mode to form nanorods. Finally, nanorods grown under the different growth modes are compared and discussed. |
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| Keywords: | nanorods LEDs chemical vapor deposition electro‐optical devices |
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