Tailoring the Mechanical Properties of High‐Aspect‐Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings

The porous nature of carbon nanotube (CNT) arrays allows for the unique opportunity to tailor their mechanical response by the infiltration and deposition of nanoscale conformal coatings. Here, we fabricate novel photo‐lithographically defined CNT pillars that are conformally coated with amorphous silicon carbide (a‐SiC) to strengthen the interlocking of individual CNTs at junctions using low pressure chemical vapor deposition (LPCVD). We further quantify the mechanical response by performing flat‐punch nanoindentation measurements on coated CNT pillars with various high‐aspect‐ratios. We discovered new mechanical failure modes of coated CNT pillars, such as “bamboo” and brittle‐like composite rupture as coating thickness increases. Furthermore, a significant increase in strength and modulus is achieved. For CNT pillars with high aspect ratio (1:10) and coating thickness of 21.4 nm, the compressive strength increases by an order of magnitude of 3, towards 1.8 GPa (from below 1 MPa for uncoated CNT pillars) and the elastic modulus increases towards 125 GPa. These results show that our coated CNT pillars, which can serve as vertical interconnects and 3D super‐capacitors, can be transformed into robust high‐aspect‐ratio 3D‐micro architectures with semiconductor device compatible processes.