Air Vortices and Nano-Vibration of Aerostatic Bearings |
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| Authors: | Xuedong Chen Han Chen Xin Luo Yixi Ye Yuantai Hu Jiaqiang Xu |
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| Affiliation: | (1) State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, China;(2) Department of Mechanics, School of Civil Engineering and Mechanics, Huazhong University of Science and Technology, Wuhan, 430074, China;(3) Department of Chemistry, College of Science, Shanghai University, Shanghai, 200444, China |
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| Abstract: | Small vibration on the order of nanometers poses challenges for the application of aerostatic bearings in ultra-precision
machine tools and metrology equipments. In this article, the flow field in aerostatic bearings is numerically investigated
and air vortices in the recess are analyzed. Vibration of the aerostatic bearing is also experimentally measured. Design and
functioning parameters are varied to study their effects on the air vortices and nano-vibration of aerostatic bearings, and
a direct relationship is established between the gas vortices and nano-vibration in aerostatic bearings. It is demonstrated
that vibration energy of the aerostatic bearing increases with the strength of air vortices. |
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