| 溶胶-凝胶法与射频磁控溅射法制备ZnO薄膜及其表征对比 |
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| 引用本文： | 任思雨,王英连,孙汪典,刘玉华.溶胶-凝胶法与射频磁控溅射法制备ZnO薄膜及其表征对比[J].材料工程,2004(11):50-52,56. |
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| 作者姓名： | 任思雨 王英连 孙汪典 刘玉华 |
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| 作者单位： | 暨南大学物理系,广州,510632;暨南大学物理系,广州,510632;暨南大学物理系,广州,510632;暨南大学物理系,广州,510632 |
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| 摘 要： | 分别对溶胶-凝胶法和磁控溅射法制备ZnO进行了详细的介绍,并借助X射线衍射、原子力显微镜、拉曼光谱分析、紫外吸收等检测手段对这两种方法生长的薄膜进行了分析比较.分析显示:相同石英基底,相同退火温度下生长ZnO薄膜,磁控溅射法生长的ZnO薄膜要比溶胶-凝胶法生长的ZnO薄膜有更优异的c轴取向特性,生长的薄膜结晶更加均匀、致密.
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| 关 键 词： | ZnO薄膜 溶胶-凝胶 磁控溅射 |
| 文章编号： | 1001-4381(2004)11-0050-03 |
Characteristic Comparison of ZnO Thin Film Prepared by Sol-gel Method and R.F.Magnetron Sputtering |
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| REN Si-yu,WANG Ying-lian,SUN Wang-dian,LIU Yu-hua.Characteristic Comparison of ZnO Thin Film Prepared by Sol-gel Method and R.F.Magnetron Sputtering[J].Journal of Materials Engineering,2004(11):50-52,56. |
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| Authors: | REN Si-yu WANG Ying-lian SUN Wang-dian LIU Yu-hua |
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| Abstract: | ZnO thin films were successfully fabricated by sol-gel method and R.F. Magnetron Sputtering on quartz glass substrates. The preparing details were thoroughly introduced. X-ray Diffractometer (XRD), Atomic Force Microscope (AFM) , Raman Scattering Spectroscope (RAMAN), UV-Vis Absorp-tion(UV-Vis) were used to carried out specific studies and comparisons of their specialties. The results show that, coated on same substrates, annealed at same temperature, the films prepared by magnetron sputtering show much more prominent c-axis orientation and excellent crystallinity than those prepared by sol-gel. |
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| Keywords: | ZnO thin film sol-gel R F magnetron sputtering |
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