Photocatalytic properties of Au/TiO2 thin films prepared by RF magnetron co-sputtering |
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| Authors: | Jong Min Jung Eui Jung Kim |
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| Affiliation: | a Department of Physics, University of Ulsan, Ulsan 680-749, Republic of Korea
b Department of Chemical Engineering, University of Ulsan, Ulsan 680-749, Republic of Korea |
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| Abstract: | Au/TiO2 thin films with various Au doping contents were deposited on quartz substrates by radio frequency (RF) magnetron co-sputtering. The as-deposited Au/TiO2 films were characterized by energy-dispersive X-ray spectroscopy (EDS), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), XRD, and UV-vis techniques. Au doping and UV treatment enhanced the photocatalytic efficiency of TiO2 thin films. The optimal RF power of the Au target and UV treatment time were 5 W and 1 h, respectively. The enhanced photoactivity of Au(5 W)/TiO2 thin films with UV treatment is found to result from the increased hydroxyl concentration. |
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| Keywords: | Sputtering method TiO2 thin film Au doping Binding energy UV treatment Photocatalytic activity |
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