| 真空阴极弧离子镀阴极斑点的移动研究 |
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| 引用本文： | 李刘合,夏立芳,白羽.真空阴极弧离子镀阴极斑点的移动研究[J].真空科学与技术学报,1999,19(6):3. |
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| 作者姓名： | 李刘合 夏立芳 白羽 |
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| 作者单位： | 哈尔滨工业大学材料学院!哈尔滨150001 |
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| 摘 要： | 建立了真空阴极弧离子镀圆形平面靶侧面引弧时 ,阴极斑点的受力模型 ,分析了影响电弧运动的因素 ,改进了圆形平面靶侧面形状 ,大大提高了石墨靶阴极斑点从侧面到靶平面的过渡速度
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| 关 键 词： | 真空阴极弧离子镀 阴极斑点 电弧 |
Studies of Arc Cathode Spot Motion in Vacuum Arc Deposition |
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| Li Liuhe,Xia Lifang,Bai Yu,Ma Xinxin,Sun Yue.Studies of Arc Cathode Spot Motion in Vacuum Arc Deposition[J].JOurnal of Vacuum Science and Technology,1999,19(6):3. |
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| Authors: | Li Liuhe Xia Lifang Bai Yu Ma Xinxin Sun Yue |
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| Abstract: | The forces acting on the cathode arc spot were tentatively modeled to understand the mechanism and motion of the spot during the arc,ignited at a side of the disk shaped target,moves to the top surface of the target in vacuum arc deposition.Various factors affecting the motion of the arc spot were qualitatively discussed.We found that the motion of the graphite cathode arc spots can be considerably accelerated by optimizing the side geometry of a disk shaped cathode. |
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| Keywords: | Vacuum arc deposition Cathodic arc spot Arc |
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