| 基于数字光刻技术的光纤端面微光学器件制作 |
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| 引用本文： | 余秋香,易云.基于数字光刻技术的光纤端面微光学器件制作[J].适用技术之窗,2011(3):132-134. |
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| 作者姓名： | 余秋香 易云 |
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| 作者单位： | [1]江西应用技术职业学院,江西赣州341000 [2]赣南师范学院,江西赣州341000 |
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| 摘 要： | 本文提出采用DMD数字光刻技术制作光纤端面微光学器件,基于DMD数字光刻系统,建立了用于制作光纤端面微光学器件的双光源DMD数字光刻系统。利用双光源DMD数字光刻系统,在芯径为62.5μm,外径为125μm的多模光纤端面上制作了具有耦合作用的环形光栅。本技术中光纤端面微光学器件的掩模由计算机控制输出,具有设计灵活、实时控制的优点。
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| 关 键 词： | 光纤端面 微光学器件 双光源DMD数字光刻系统 数字光刻技术 |
Fabrication of Micro Optics Elements in the End Face of the Optical Fibers Biased on the Digital Lithography Technique |
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| Yu Qiuxiang Yi Yun.Fabrication of Micro Optics Elements in the End Face of the Optical Fibers Biased on the Digital Lithography Technique[J].Science & Technology Plaza,2011(3):132-134. |
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| Authors: | Yu Qiuxiang Yi Yun |
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| Affiliation: | Yu Qiuxiang Yi Yun(1.Jiangxi Vocational College of Applied Technology,Jiangxi Ganzhou 341000;2.Gannan Normal University,Jiangxi Ganzhou 341000) |
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| Abstract: | On the basis of digital lithography technique,a new method,namely double-light-sources DMD digital lithography technique is used for the fabrication of binary optical elements in the end face of the multimode fibers.Using this technique,micro-optical elements of circular gratings have been made in the end face of multimode fibers,whose outer diameter is 125μm and inner diameter is 62.5μm.In the system the digital mask of the micro len was controlled by the computer,so it has advantages of flexible designning and controling in real-time. |
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| Keywords: | The End Side of Optical Fibers Binary Optical Elements Double-light-sources DMD Digital Lithography System、 Digital Lithography Technique |
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