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Growth of Aligned Carbon Nanotubes through Microwave Plasma Chemical Vapor Deposition
Authors:Wang Shenggao  Wang Jianhua  Ma ZhibinWang Chuanxin  Man WeidongProvince Key Laboratory of Plasma Chemistry & Advanced Materials  Wuhan Institute of Chemical Technology  Wuhan  ChinaInstitute of Plasma Physics  Chinese Academy of Science  Hefei  China
Affiliation:Province Key Laboratory of Plasma Chemistry & Advanced Materials, Wuhan Institute of Chemical Technology, Wuhan 430074, China;Institute of Plasma Physics, Chinese Academy of Science, Hefei 230031, China
Abstract:Aligned carbon nanotubes (CNTs) were synthesized on glass by microwave plasma chemical vapor deposition (MWPCVD) with a mixture of methane and hydrogen gases at the low temperature of 550 ℃. The experimental results show that both the self-bias potential and the density of the catalyst particles are responsible for the alignment of CNTs. When the catalyst particle density is high enough, strong interactions among the CNTs can inhibit CNTs from growing randomly and result in parallel alignment.
Keywords:carbon nanotubes  microwave plasma  chemical vapor deposition
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