| 梳齿差分电容式体硅微加速度计(英文) |
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| 引用本文： | 何洪涛,徐永青,杨拥军,吕苗,郑锋,吝海峰.梳齿差分电容式体硅微加速度计(英文)[J].微纳电子技术,2002,39(11):25-28. |
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| 作者姓名： | 何洪涛 徐永青 杨拥军 吕苗 郑锋 吝海峰 |
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| 作者单位： | 河北半导体研究所,河北,石家庄,050051 |
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| 摘 要： | 提出了一种体硅微加速度计的设计和制造方法,同时设计了它的闭环反馈伺服电路,分析了加速度计的质量块、悬臂梁和梳尺间隙对量程、非线性、灵敏度、抗冲击能力和带宽等特性的影响。已经加工出的微加速度计,其全量程为±60g,非线性度0.2%,带宽1kHz,灵敏度200mV/g,抗冲击能力10kg。对由加速度计结构设计、温度和伺服电路造成的零位漂移现象进行了分析,提出了一种制造微加速度计的新颖MEMS工艺———正面释放体硅工艺。
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| 关 键 词： | 微机电系统 正面释放体硅工艺 加速度计 |
A bulk-silicon micro-accelerometer with comb differential-capacitance |
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| Abstract.A bulk-silicon micro-accelerometer with comb differential-capacitance[J].Micronanoelectronic Technology,2002,39(11):25-28. |
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| Authors: | Abstract |
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| Abstract: | A bulk-silicon micro-accleerometer and its closed loop feedback servo-circuit are presented.In this paper,the effects of mass,beam and gap on full-scale range,nonlinearity,sensitivity,shock survival and bandwidth are analyzed.The micro-accelerometer was successfully fabricated with +-60g full-scale range,0.2% nonlinearity,1kHz bandwidth,200 mV/g sensitivity,10kg shock survival,Bias stability caused by structure,temperature and servo-circuit of the accelerometer are analyzed.A novel MEMS process,called frontside-release bulk-silicon process in proposed. |
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| Keywords: | MEMS frontside-release bulk-silicon process accelerometer |
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