基于柔性铰链微动平台的自抗扰控制方法

微动平台一般以柔性铰链为导向机构，由于系统固有频率低，会严重限制传统PID算法的控制带宽，影响定位精度。因此，设计自抗扰控制算法（ADRC）将系统未建模动态与外部未知扰动共同视作“总扰动”，通过扩张状态观测器（ESO）进行估计和补偿，提高系统的控制带宽。为了充分利用已知的模型信息，设计基于模型的ADRC算法，将柔性铰链标称模型输入到ESO中，进一步提升系统的控制性能。最后，通过10 μm行程的点位运动实验进行验证。结果表明：因为控制带宽无法过大而导致PID难以响应，ADRC提高了控制系统带宽，实现了精密定位；模型ADRC进一步提升了响应速度与定位精度。相比ADRC，模型ADRC整定时间缩短了68.1%，最大跟踪误差降低了53.8%，定位精度提升了60.7%。

Active Disturbance Rejection Control Method for Flexure Hinge Micro Stage

Flexure hinge is usually used as the guide mechanism for the micro stage， due to the low natural frequency of the micro stage system,the control bandwidth of traditional PID is severely limited and the positioning precision is affected.Therefore,an active disturbance rejection control (ADRC) algorithm was designed,considering the unmodeled dynamics and external unknown disturbance as the total disturbance.And then,the total disturbance was estimated and compensated by extend states observer (ESO) to improve the control bandwidth of the system.In order to make full use of the known model information,a model-based ADRC algorithm was designed,the control performance of the micro stage system was further improved.As a result,a point-to-point motion experiment with a stroke of 10 μm was carried out.The results show that:PID is difficult to respond because the control bandwidth cannot be too large,and ADRC improves the bandwidth of the control system and achieves precise positioning.The response speed and positioning precision are further improved with model-based ADRC.Compared with ADRC,the setting time of model-based ADRC is reduced by 68.1%,the maximum tracking error is reduced by 53.8%,and the positioning precision is improved by 60.7%.