钽掺杂对多层Ta-DLC薄膜摩擦及腐蚀行为的影响

目的 解决316L不锈钢在苛刻海洋环境中易磨损、易腐蚀的问题。方法 采用中频磁控溅射技术在316L不锈钢上沉积了Ta/TaN/TaCN/Ta-DLC薄膜。通过扫描电子显微镜、拉曼光谱、X射线光电子能谱、X射线衍射、纳米压痕、往复摩擦磨损试验和电化学测试等手段，重点研究了DLC膜层中Ta元素掺杂含量对薄膜结构、组成成分、力学性能、摩擦学性能和耐腐蚀性能的影响规律。结果 随着Ta元素含量(原子数分数)从2.04%增到4.16%，薄膜中的sp³键含量呈现先升高后降低的趋势，当Ta原子数分数为3.60%时，薄膜中sp³键含量最高，且薄膜的硬度及弹性模量达到最大，分别为7.01 GPa和157.87 GPa。随着Ta元素含量的增加，薄膜的平均摩擦因数逐渐减小，在4.16%(原子数分数)时达到最小0.21。Ta元素含量对薄膜的结合力影响较小，且所有薄膜结合力总体在10 N左右。当Ta原子数分数为3.60%时，薄膜的腐蚀电流密度及钝化电流密度最小，分别为0.006 μA/cm²和0.63 μA/cm²，比其他薄膜的低1~2个数量级，并且薄膜电阻及电荷转移电阻最大，展现出最为优异的耐腐蚀性能。结论 Ta元素的掺杂提高了薄膜的耐摩擦性能，且适当的Ta元素掺杂能够提高Ta/TaN/TaCN/Ta-DLC薄膜的耐磨耐蚀性能。

Effects of Tantalum Doping on Friction and Corrosion Behavior of Multilayer Ta-DLC Films

Diamond-like carbon (DLC) films are widely applied in material protection due to high hardness, excellent wear resistance, and corrosion resistance. To solve the problem that 316L stainless steel is prone to wear and corrosion in the environment of marine friction and corrosion, Ta/TaN/TaCN/Ta-DLC films were deposited on 316L stainless steel by mid-frequency magnetron sputtering technology. The surface morphology, cross-sectional morphology, and corrosion morphology of the prepared films were observed by scanning electron microscopy (SEM). Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), and X-ray diffractometer (XRD) were used to analyze the electronic structure of carbon element, chemical bond information, and phase composition in DLC films, respectively. The tribological and mechanical properties were tested by scratch method, nanoindentation test, and friction and wear test. The corrosion resistance of the films was tested by the electrochemical method. The effect of Ta element content in DLC film on the structure, composition, mechanical properties, tribological properties and corrosion resistance of the film was studied.