| Abstract: | Because the pixel area of liquid‐crystal‐on‐silicon (LCoS) microdisplays is about 100 times smaller than that of direct‐view liquid‐crystal displays (LCDs), the limitations of the conventional alignment by brushing are obvious: Scratches and particle contamination caused by brushing become visible due to the strong optical magnification required for LCoS LCDs both in front or rear projection. As an alternative, photoalignment with the linear photo‐polymerization (LPP) technology avoids the generation of defects, thus increasing production yields considerably. For application in LCoS LCDs, alignment layer materials must match the high‐voltage holding ratio (VHR) specifications of TFT‐LCDs. The VHR performance of the newly developed second‐generation LPP materials is shown to be similar to standard TFT polyimides used for conventional brushed alignment. We report investigations of pretilt‐angle generation by photoalignment on reflective CMOS substrates. UV light reflected from the CMOS surface during LPP exposure affects the resulting pretilt angle. Compared to pretilt angles on transmissive substrates, the reflected UV light can induce lower, higher, or identical pretilt angles, depending on LPP material properties. In any case, the pretilt angles are well defined, which results in perfect LCD alignment. |
