Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers |
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Authors: | Gaudo MV Abadal G Verd J Teva J Perez-Murano F Costa EF Montserrat J Uranga A Esteve J Barniol N |
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Affiliation: | Univ. Autonoma de Barcelona, Barcelona; |
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Abstract: | The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass. |
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