| 石英谐振式力传感器及几个工程问题的研究 |
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| 引用本文： | 王晓红,朱惠忠,董永贵,冯冠平. 石英谐振式力传感器及几个工程问题的研究[J]. 仪器仪表学报, 1999, 20(3): 275-279 |
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| 作者姓名： | 王晓红 朱惠忠 董永贵 冯冠平 |
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| 作者单位： | 清华大学精密仪器与机械学系,北京,100084 |
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| 基金项目： | 国家“九．五”重点科技攻关项目!96—748—01一94 |
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| 摘 要： | 本文介绍了一种高准确度石英谐振式力传感器，针对其在工程化过程中遇到的一系列问题，从理论到实验进行了研究，解决了组合式结构石英传感器的蠕变问题，并研究了传感器的稳定性与谐振器厚度及支撑状况的关系。
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| 关 键 词： | 石英谐振器 力传感器 蠕变 胶粘剂 稳定性 |
Study for the Quartz Resonator Force Sensor and Its Engineering Problems |
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| Wang Xiaohong,Zhu Huizhong,Dong Yonggui,Feng Guanping. Study for the Quartz Resonator Force Sensor and Its Engineering Problems[J]. Chinese Journal of Scientific Instrument, 1999, 20(3): 275-279 |
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| Authors: | Wang Xiaohong Zhu Huizhong Dong Yonggui Feng Guanping |
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| Affiliation: | Dept. of Precision Instrument and Mechanology Tsinghua University Beijing 100084 |
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| Abstract: | This paper introduces a kind of quartz resonator force sensors with high precision. Several engineering problems are studied with methodology and experiments. The creep of the sensor of combinatory structure is resolved,and the effects of the thickness of resonator and its supporting on the stability of sensor are also analyzed. |
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| Keywords: | Quartz crystal resonator Force sensor Creep Adhesive Stability |
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