电子级磷酸的生产工艺及发展现状

电子级磷酸常用于高精度、大规模集成电路以及精密电子元器件等生产过程中的清洗以及蚀刻阶段。随着各类高精度电子元器件的更新换代速度加快,对电子级磷酸控制微粒的要求也更高。已经工业化的MOS以及BVI级磷酸已经实现了工业生产,但是更加精细化的电子级磷酸市场依旧在发达国家垄断下,进口依赖度高,我国尚未有相应的工业化生产线,配套的检测设备以及分析方法也不甚健全。本文主要介绍电子级磷酸生产工艺及其市场应用,同时对电子级磷酸工业化发展战略进行了分析。

Status and Development of Production Technology of Electronic Grade Phosphoric Acid

Electronic grade phosphoric acid was often used in the cleaning and etching stages of high precision, large scale integrated circuit （IC） and precision electronic components, such in the process of production. With the renewal speed of all kinds of high precision electronic components, the controlling of electronic grade phosphoric acid grain also needed to fit higher requirements. The MOS and BVI grade achieved industrial phosphoric acid production, but the market of more sophisticated electronic grade phosphoric acid remained under monopoly by developed countries. The import dependence of our country was very high. China did not possess a corresponding industrialization production line, also a complete set of testing equipment and analysis method was not set completely. The production technology and the market application of electronic grade phosphoric acid were focused on. At the mean time, the industrialization development strategy of the electronic grade phosphoric acid industrialization development strategy was also analyzed.