Impact of scaling silicon film thickness and channel width on SOIMOSFET with reoxidized MESA isolation |
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Authors: | Fung SKH Chan M Ko PK |
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Affiliation: | Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol.; |
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Abstract: | The characteristics of reoxidized MESA isolation for silicon-on-insulator (SOI) MOSFET have been studied in terms of the dependence of device performance on silicon film thickness and channel width scaling. For devices with silicon film thickness (TSi) smaller than a critical thickness, humps appear in subthreshold IV and negative threshold voltage shift is observed in narrow width devices. The width encroachment (ΔW) also increases rapidly with reducing T Si. These observations can be explained by the formation of sharp beak and accelerated sidewall oxide growth in these devices. A simple guideline is given to optimize the reoxidation process for different TSi |
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