Diagnostics of reactive RF plasmas

Experimental characterization of the plasma state as well as the neutral gas phase in a low pressure discharge is presented. A radiofrequency supply produces plasma driving an electrical discharge in a gas mixture through a resonant inductive coupling. The plasma state has been characterized by means of electrostatic probes, optical emission spectroscopy. Mass spectroscopy of the neutral and of the charged species has been performed too, sampling the gas phase inside the discharge. Results on Ar/SF₆ plasmas are presented to study the effect of argon doping on the production of reactive atomic fluorine in the discharge. More efficient application of Ar/SF₆ plasmas to surface fluorination of polymers could be expected in view of these results.