原子力显微镜传感器的微机械加工技术的研究

分析了现有的AFM力传感器的工艺特点及问题。在此基础上研究用KOH溶液两步法P+自停止腐蚀制作厚度精确可控的单晶硅悬臂梁;以SiO2为掩模,SF6刻蚀硅,用RIE与各向同性湿法化学腐蚀相结合使悬臂梁探针一次成形和用湿法腐蚀锐化探针,针尖半径约50nm.制定了适于批量生产的AFM力传感器加工工艺。

Investigation of Microfabrication of the Force Sensor for the Atomic Force Microscope

In this paper,the leading feature of existent micromachining technology of AFM force sensors is discussed.On the basis of those,two step corrosion with KOH solution are researched,using heavily boron doped silicon as etch stop layer.Cantilever beams with precise thickness are formed from single crystal silicon.By means of SiO 2 mask and SF 6 etching corrosive,the cantilever beam with tip is shaped by reactive ion etching once through operation.The probe has been shaped by wet corrosive and the tip radius is about 50 nm.A batch fabrication process based on micromachining technology is presented for cantilevers with integrated conical tips which are suitable for the AFM.