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PAMBE growth of (1 1 2¯ 2)-oriented GaN/AlN nanostructures on m-sapphire
Authors:L. Lahourcade  J. Renard  B. Gayral  P. Ruterana
Affiliation:a CEA-CNRS group Nanophysique et Semiconducteurs, CEA-Grenoble, INAC/SP2M/NPSC, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France
b CIMAP, UMR 6252, CNRS-ENSICAEN-CEA-UCBN 6 Bd du maréchal juin, 14050 Caen, France
Abstract:We report on the plasma-assisted molecular-beam epitaxial growth of (1 1 2¯ 2)-oriented GaN/AlN nanostructures on (1 1¯ 0 0) m-plane sapphire. Moderate N-rich conditions enable to synthesize AlN(1 1 View the MathML source 2) directly on m-sapphire, with in-plane epitaxial relationships [1 1 2¯ 3¯]AlN∥[0 0 0 1]sapphire and [1 View the MathML source 0 0]AlN∥[1 1 2¯ 0]sapphire. In the case of GaN, a Ga-excess of one monolayer is necessary to achieve two-dimensional growth of GaN(1 1 2¯ 2). Applying these growth conditions, we demonstrate the synthesis of (1 1 2¯ 2)-oriented GaN/AlN quantum well structures, showing a strong reduction of the internal electric field. By interrupting the growth under vacuum after the deposition of few monolayers of GaN under slightly Ga-rich conditions, we also demonstrate the feasibility of quantum dot structures with this orientation.
Keywords:PAMBE   GaN   Semipolar   Quantum wells   Quantum dots
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