| 小型化热丝CVD金刚石膜沉积设备的研究与开发 |
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| 引用本文： | 吴小军,左敦稳,徐锋,卢文壮,林欢庆.小型化热丝CVD金刚石膜沉积设备的研究与开发[J].机械制造与自动化,2010,39(2):35-38,79. |
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| 作者姓名： | 吴小军 左敦稳 徐锋 卢文壮 林欢庆 |
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| 作者单位： | 南京航空航天大学,机电学院,江苏,南京,210016 |
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| 基金项目： | 江苏省自然科学基金，南京航空航天大学创新科研基金，中国博士后科学基金，江苏省博士后科研资助计划 |
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| 摘 要： | 对传统HFCVD金刚石膜沉积设备进行小型化改进,分析了传统沉积设备在真空系统和衬底机构结构上的不足之处;介绍了小型化CVD金刚石膜沉积设备的系统构成;详细描述了该小型化设备的真空系统和衬底摆动机构。该系统具有均匀的表面温度场和很高的运行稳定性,可以用于纳米金刚石薄膜和金刚石厚膜的沉积,制备的纳米金刚石薄膜晶粒大小基本上都在200 nm以下,纳米硬度为(450~700)GPa;沉积的金刚石厚膜直径达93 mm,晶粒完整均匀。
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| 关 键 词： | CVD金刚石膜 小型化 热丝化学气相沉积 摆动衬底 |
Study and Development of Miniature Hot-filament CVD Diamond Film Deposition Equipment |
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| WU Xiao-jun,ZUO Dun-wen,XU Feng,LU Wen-zhuang,LIN Huan-qing.Study and Development of Miniature Hot-filament CVD Diamond Film Deposition Equipment[J].Machine Building & Automation,2010,39(2):35-38,79. |
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| Authors: | WU Xiao-jun ZUO Dun-wen XU Feng LU Wen-zhuang LIN Huan-qing |
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| Affiliation: | WU Xiao-jun,ZUO Dun-wen,XU Feng,LU Wen-zhuang,LIN Huan-qing(College of Mechanical , Electrical Engineering,Nanjing University of Aeronautics , Astronautics,Nanjing 210016,China) |
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| Abstract: | In this paper,the structural miniaturization of the traditional HFCVD diamond film deposition equipment is improved.The structural shortages of vacuum system together with substrate platform organization of traditional deposition equipment is analyzed.System structure of miniature CVD diamond film deposition equipment is presented.The improved miniature vacuum system and the substrate platform organization is described in detail.Testing results show that this system has a uniform substrate temperature field... |
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| Keywords: | CVD diamond film miniaturization hot-filament CVD swingable substrate |
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