| BPxN1-x薄膜的制备及磷元素对其光学能隙的影响 |
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| 引用本文： | 徐世友,祁英昆,张溪文,韩高荣.BPxN1-x薄膜的制备及磷元素对其光学能隙的影响[J].材料科学与工程学报,2003,21(3):335-338. |
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| 作者姓名： | 徐世友 祁英昆 张溪文 韩高荣 |
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| 作者单位： | 硅材料国家重点实验室,浙江大学材料系,浙江,杭州,310027 |
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| 基金项目： | 国家自然科学基金，60006003， |
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| 摘 要： | 本文从应用出发，选择光学石英为衬底，采用热丝辅助射频化学气相沉积的方法沉积BPxN1—x薄膜，对样品进行了X射线衍射(XRD)、扫描电子显微镜(SEM)、紫外—可见等测试。XRD、SEM结果显示薄膜多晶态，表面形貌随时间变化，最终为胞状；紫外—可见光光谱结果显示BPxN1—x薄膜的紫外吸收边随沉积时间的加长、PH3流量的增加而向长波长方向移动。因此，该材料的光学能隙可以通过生长工艺适当调整。另外，BPxN1—x薄膜与液晶层能较好匹配等特性更使其适用于紫外空间光调制器。
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| 关 键 词： | BPxN1－x薄膜 制备 磷元素 掺杂 紫外液晶光阀 光学能隙 热丝辅助射频化学气相沉积 氮化硼 |
| 文章编号： | 1004-793X(2003)03-0335-04 |
| 修稿时间： | 2002年12月30日 |
Deposition of BPx N1-x Thin Films and Study on the Influence of Phosphorus for its Bandgap Modulation |
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| XU Shi-you,QI Ying-kun,ZHANG Xi-wen,HAN Gao-rong.Deposition of BPx N1-x Thin Films and Study on the Influence of Phosphorus for its Bandgap Modulation[J].Journal of Materials Science and Engineering,2003,21(3):335-338. |
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| Authors: | XU Shi-you QI Ying-kun ZHANG Xi-wen HAN Gao-rong |
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| Abstract: | BP-xN 1-x thin films were deposited by hot filament assistant r.f.plasma enhanced chemical vapor technique(HF-PECVD) on quarts glass polished wafer substrates for apllication.The films were studied by X-ray diffraction(XRD),Scanning electron microscopy(SEM) and U-V spectrum.It is found that:(1)these thin films are polycrystals,their morphology changes with time and becomes ball-like at last.(2)optical bandgap of these films become narrow with time and the flux of PH-3 increased.Potential application of BP-xN 1-x thin films for ultraviolet spatial light modulator was suggested. |
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| Keywords: | BP-xN 1-x optical bandgap P dopant UV-LCLV |
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