压电陶瓷管驱动三自由度微操作手的研究与应用

基于机构、驱动、检测一体化的设计思想，研制出压电陶瓷管驱动的三自由度微操作手，研究了微操作手的建模、驱动与位置检测，给出了静力学建模公式，研制出双极性压电陶瓷驱动电源、微位移检测电路，并构成高精度位置闭环控制系统，实现了纳米级微动定位。最后以微操作手为核心构成微操作机器人系统，通过微操作手的微动调整，成功完成了直径为Φ0.2mm轴孔零件的微装配任务。

Research and Application of Three Degree-of-Freedom Micromanipulator Driven by Piezoelectric Tube

Based on the idea that the integration of mechanism and actuator and sensor,a three degree of freedom micromanipulator driven by piezoelectric tubes was developed.Modeling and driving and measuring of micromanipulator were studied.As a result,the static modeling formula was established,the bipolar piezoelectric driver and measuring system of micro displacement were developed.Accordingly,a high precision position closed loop control system was founded and nanometer scale micro positioning was realized.At last,being a key component,the micromanipulator was applied to a micromanipulating robot.Thanks to micro positioning of micromanipulator,the peg in hole task with diameter of 0 2 micrometer was finished successfully.